Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC) - June 2024
COSINConnect
It is with great pleasure to launch our first-ever semi-annual newsletter, COSINConnect, which is all about the Colorado Shared Instrumentation in Nanofabrication and Characterization (COSINC), our diverse user community and enabling research impacts. We will provide you with the latest information on our facilities, including new instruments, upgrades, future plans, and most importantly, the impacts that COSINC is making on research, innovation, education and equitable access to shared-user facilities.
COSINC is a multidisciplinary shared-user facility, within the College of Engineering and Applied Science that provides state-of-the-art access to a wide range of instruments in the areas of micro/nano fabrication, materials characterization, metrology and offers expertise, hands-on training and facilitates courses in the same related areas. COSINC serves over 600 users and 200 principal investigators across CU Boulder, including external academic institutions, national labs, and local industry. The facility enables research and innovations in a wide range of scientific and technological research areas, from electronics, photonics, quantum science, energy, environment to biomedical, pharmaceutical and nanomedicine.
We invite you to explore our facilities and to get to know our team and their expertise. Reach out and let's discuss how we may enable your research projects and contribute to your success! View our COSINC Facilities page and learn about the various capabilities that may help in your current and future research projects.
Instrumentation
COSINC oversees and manages a wide range of instrumentation in the areas of material characterization and micro/nanofabrication tools.
The recently built ISO 5 and 6 cleanroom facility is about 3,400 ft2 and is supported by a 1,200 ft2 mechanical room, which became operational in January 2023.
Selected highlights and the notable capabilities include a state-of-the-art Low Energy Ion Spectroscopy (LEIS) (Iontof QTac100) integrated with X-Ray Photoelectron Spectroscopy (XPS) (Kratos Axis Supra), that provides the elemental composition of the outer atomic layer composition and the sample composition and chemical shift information within the first 10 nm surface layer, respectively. These two systems work independently but they are connected to a sample transfer chamber under high vacuum so that samples can be easily transferred from one unit to the other, without the need to break vacuum and expose or contaminate the samples to air.
COSINC will truly have the capability to fabricate structures at the nanoscale, as small as 1 nm linewidths that is equivalent to about 8,000 times smaller than the size of human hair, over large areas in the centimeter range. A state-of-the-art Electron Beam Lithography (EBL) 100kV system, Raith5150plus has been acquired through an NSF award and will be installed in a bay in the COSINC cleanroom. The system is integrated with a powerful software tool (Beamer, GenISys) to manage electron scattering effects and optimize the designed pattern data effectively. The design for reconfiguring the cleanroom bay has begun and the timeline for the tool install is late fall/winter. The applications of this technology are diverse, enabling device nanofabrication in areas ranging from electronic, photonic devices, quantum structures to biomedical microdevices, bioMEMS and DNA sensing.
The X-Ray Diffraction (XRD) (Rigaku SmartLab 9kW) system is one of the latest additions to our material characterization suite. X-rays have high energy and short wavelength when compared to visible light making them ideal for probing the interplanar distances in crystalline materials. Measurements of powder samples give information including crystallographic phase identification, lattice parameters, and crystallite size (< 200 nm) and internal strains. Commonly measured materials include battery electrode materials, catalyst nanoparticles on ceramic or carbon supports, metal-organic frameworks, corrosion products, geologic minerals, and a variety of other synthesized crystalline materials.
The Angstrom Engineering high vacuum thin-film deposition system is one of several new capabilities in our cleanroom and will be available in July. The system offers dual capability of electron beam evaporation and sputtering. This technology is a critical step in a wide range of device nanofabrication from electronics, photonics to magnetics and biomedical device coatings. These physical deposition methods offer great versatility and complement each other, with the material types and compositions, choice of substrates and the deposition temperature, and the ability to produce high purity materials. This instrument is expected to impact several research projects at CU Boulder, especially in integrated photonics, non-linear photonics, and quantum photonics, where the ability to produce high quality thin films with extremely low impurity levels, high uniformity, and the ability to control material properties such as nonlinearity and loss, are critical.
Impacts on Research and Innovation
Boosting lithium-ion batteries
Microbots for drug delivery
Diamond enabling scalable quantum systems
Impacts on Education and Training
Nanofabrication and nano-characterization techniques are two of the major enablers for the development and realization of miniaturized devices for a wide range of scientific and technological applications, from optical devices, photonics, quantum structures, nano-electronics, photovoltaics to bio-medical devices. These techniques are critical to support research and innovations in semiconductor and quantum device fabrication areas.
It is imperative that we educate and train the current and next generation of scientists and engineers in these key areas. Research, education and hands-on activities go together for learning to be more effective. The need for workforce development in this area is driven by the CHIPS and Science Act, known for its intent to revive the US semiconductor industry and perhaps the most significant new workforce initiative in the last 15 to 20 years. However, education and training in this area may be falling short. To help address this critical gap, COSINC offers several workshops and facilitates lab sections in our facilities and cleanrooms. Our hands-on workshops are offered each year on a wide range of instruments and technologies.
Recent lab sections were supported for undergraduate courses, such as Semiconductor devices (ECEN 3320) taught by Mona ElHelbawy, associate teaching professor in Electrical, Computer & Energy Engineering. This was the first offering of cleanroom labs designed for an introduction of the basic semiconductor fabrication processes. Other labs and instrument demonstrations that were supported in the COSINC characterization suites (XPS, SEMS, XRD and AFM) were for the graduate course in Materials Characterization for Engineering (MSEN 5270) taught by Mike Toney, professor of Chemical and Biological Engineering and Materials Science and Engineering.
COSINC’s goal is to garner more support and develop resources to facilitate a wide range of courses with hands-on lab sections for both undergraduate and graduate level courses in the coming years.